LAM Equipment & Parts
LAM equipment and parts are divided into 2 sections:
1) parts and systems we HAVE AVAILABLE, and
2) parts and systems we may be able to SOURCE and/or have SOLD.
Parts and Systems we HAVE AVAILABLE:
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-006
LAM Switching Power Supply, Part Number: 660-093827-001, 7 DC outputs
LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-116 w/ 810-017086-106
LAM CPU 3 Board, Part Number: 810-017034-003
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-008
LAM A4 Alliance CPU Board, Part Number: 810-057050-003
LAM CPU Board, Part Number: 810-017034-300
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-106
LAM A4 Alliance CPU Board, Part Number: 810-057050-003
LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-004 w/ 810-017086-004
LAM / Advanced Energy 5" Diffuser, Part Number: 716-006446-001, for LAM 490/590 AutoEtch
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-670
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-003
LAM Alliance 12-Channel Gas Box Control Module
LAM Paddle Lifter Assembly, Part Number: 853-032776-002
LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-006 w/ 810-017086-106
Brooks Assy PCB VT5 Main, Brooks Part Number: 001-1951-05, LAM Part Number: 810-550099-001 Rev E1
LAM Switching Power Supply, Part Number: 660-091820-001, 24V / 25 amp
LAM ADIO 4 Board, Part Number: 810-017031-004
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-002
LAM ESC Power Supply Assy, Part Number: 853-025054-005 w/ 810-017086-002 Board
LAM Electrostatic Chuck/ESC Power Supply Assy, Part Number: 853-025054-012 w/ 810-017086-006
LAM O-rings
Varian 959 helium leak detector
Varian Leak Detector Power Probe for Varian 959 Leak Detector, Part Number: 0991-K9565-301
LAM TCP 9600SE PLATE, WINDOW CHBR 715-031454-001
LAM switching power supply, Part Number: 660-091820-001 24v/25amp
Parts and Systems we may be able to SOURCE and/or have SOLD:
Parts
LAM ADIO 8 Board 810-017050-001
LAM 590 AutoEtch Board 810-091934-001
LAM motor exit load lock assembly 853-091949-002
LAM RF Coil 853-330142-060
LAM RF Coil 853-330142-080
LAM 590 Auto Etch Gap (rebuilt by AAZ Equipment)
LAM ESC Power Supply Board for a LAM TCP, Part Number: 810-370182-001
LAM shower head 716-006711-001
LAM diffusers
LAM TCP APM spin station assembly, Part Number: 853-015876-101
LAM TCP VAT Valve, Part Number: 796-090807-102
LAM TCP Retainer Universal Window, Part Number: 715-011039-001
LAM TCP window / quartz, Part Number: 716-011009-001
C16-13172B Gas Spring for LAM TCP
LAM Electrostatic Chuck/ESC Power Supply Board, Part Number: 810-017086-002
LAM 5" diffusers for AutoEtch 490/ LAM AutoEtch 590
LAM Electrode (Electrostatic Chuck/ESC) for LAM TCP 9600, Part Number: 718-094756-081
LAM TCP 9600SE Ring, FOR, LWR CHAMBER, ESC
LAM TCP 9600SE Ring, RING, FOCUS 8”, GD RING
LAM TCP 9600SE Computer
LAM TCP 9600SE ASSY, GATE DRIVE, INNER DOOR (entrance and exit)
LAM TCP 9600SE VALVE, ISO VALVE, KF-50 rebuild kit
LAM TCP 9600SE WDO, RF SHPD CER, FXD GAPN/ # 10/EB, Part Number: 716-330121-001
LAM TCP 9600SE Gas Line
LAM TCP 9600SE FLANGE, WINDOW, TURBO PUMP TC
LAM Paddle Lifter Assembly, Part Number: 853-032776-002
LAM TCP 9600SE Gas Box
Systems
LAM A6 DSiE
LAM A6 9400DFM
LAM A6 9600DFM
LAM 9600SE
LAM 9600SE II
LAM Auto Etch 490
LAM Auto Etch 590
LAM Auto Etch 690
LAM Auto Etch 790